INTERNAL AND OEM

Technical Diagnosis

Mirror Failure Analysis

Mirror Contamination

Black discoloration or "whitish smoke" indicates water leakage from the mount or moisture in the beam purge.

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Improper cleaning materials like lens cleaning tissue paper, Acetone, Ethanol will damage the coating of the mirrors and reduce lifetime. Mishandling vacuum chamber parts like discharge tubes and mirrors damages components. Skipping periodic maintenance (3000–4000 hours) leaves residue and degrades surface coatings.

Beam Alignment Failure

Beams not parallel through one or more axis can strike the lens holder, causing catastrophic failure.

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Beam not parallel through one or more axis, striking the lens holder. Beam mark not centred or improper optics mounting. Incorrect mirror alignment.

Beam Mode

Neglecting cleaning every 3000 to 4000 hours leaves permanent dust residue on internal mirrors.

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Distorted beam mode concentrates excessive energy on a small mirror area, leading to mirror explosion. Typically caused by mirror misalignment or beam delivery cooling system failure.

Refurbished Mirror

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On Maintenance
The LEI Advantage

The Ultra Clean Method

Our special refurbishment technique removes the contamination and extends the optics life and thus reducing the customer’s maintenance cost. Periodic ULTRA-Cleaning of Discharge tubes prevents further deterioration of mirrors and ensure the quality BEAM DELIVERY LIKE NEW as always.

  • Reduces heart-aching maintenance costs from costly OEM optics.
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